Production of ordered and pure Si nanodots at grazing ion...

Materials Science and Engineering: B 2014 / 1 Vol. 179

Production of ordered and pure Si nanodots at grazing ion beam sputtering under concurrent substrate rotation

Chowdhury, Debasree, Ghose, Debabrata, Satpati, Biswarup
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Volume:
179
Language:
english
Journal:
Materials Science and Engineering: B
DOI:
10.1016/j.mseb.2013.09.013
Date:
January, 2014
File:
PDF, 3.00 MB
english, 2014
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