Research of boron removal from polysilicon using...

Vacuum 2014 / 05 Vol. 103

Research of boron removal from polysilicon using CaO–Al2O3–SiO2–CaF2 slags

Li, Jiayan, Zhang, Lei, Tan, Yi, Jiang, Dachuan, Wang, Dengke, Li, Yaqiong
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Volume:
103
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.12.002
Date:
May, 2014
File:
PDF, 842 KB
english, 2014
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