Investigations of mechanical properties of microfabricated resonators using atomic force microscopy related techniques
Moczała, Magdalena, Kopiec, Daniel, Sierakowski, Andrzej, Dobrowolski, Rafał, Grabiec, Piotr, Gotszalk, TeodorVolume:
119
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.04.006
Date:
May, 2014
File:
PDF, 753 KB
english, 2014