The Effect of Si Content on the Performance of Magnetron...

Physics Procedia 2013 Vol. 50

The Effect of Si Content on the Performance of Magnetron Sputtering Hf-Si-N Films

Cui, Xiufang, Hao, Jinlong, Wang, Yang, Dong, Meiling, Jin, Guo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
50
Year:
2013
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2013.11.066
File:
PDF, 5.26 MB
english, 2013
Conversion to is in progress
Conversion to is failed