Fabrication of PIN photo-diode from p-Ge/i-Ge/n-Si hetero...

Materials Science in Semiconductor Processing 2014 / 1 Vol. 17

Fabrication of PIN photo-diode from p-Ge/i-Ge/n-Si hetero junction structure

Deok Yang, Hyeon, Kil, Yeon-Ho, Yang, Jong-Han, Kang, Sukill, Soo Jeong, Tae, Choi, Chel-Jong, Sung Kim, Taek, Shim, Kyu-Hwan
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Volume:
17
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2013.08.019
Date:
January, 2014
File:
PDF, 1.22 MB
english, 2014
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