Electrostatic and mechanical characterization of 3-D...

Sensors and Actuators A: Physical 2014 / 08 Vol. 215

Electrostatic and mechanical characterization of 3-D micro-wineglass resonators

Senkal, D., Ahamed, M.J., Trusov, A.A., Shkel, A.M.
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Volume:
215
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.02.001
Date:
August, 2014
File:
PDF, 1.81 MB
english, 2014
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