Multilayer structures of silicon-suboxide embedded in single crystal silicon
Pohl, Christoph, Raab, Nicolas, Mitterer, Martin, Tarakina, Nadezda, Breuer, Uwe, Brunner, KarlVolume:
389
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2013.11.073
Date:
March, 2014
File:
PDF, 2.30 MB
english, 2014