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Formation of zirconium silicide between silicon substrate and zirconium films
Liu, Wei, Liang, Jianhua, Zhou, Xiaosong, Long, XingguiVolume:
122
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2014.02.043
Date:
May, 2014
File:
PDF, 914 KB
english, 2014