Protrusions on the surface of graphite cathode used in the tetrahedral amorphous carbon film deposition
Hakovirta, M., Koponen, I., Lappalainen, R., Anttila, A.Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00148-9
Date:
January, 1998
File:
PDF, 1.08 MB
english, 1998