Protrusions on the surface of graphite cathode used in the...

Protrusions on the surface of graphite cathode used in the tetrahedral amorphous carbon film deposition

Hakovirta, M., Koponen, I., Lappalainen, R., Anttila, A.
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Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00148-9
Date:
January, 1998
File:
PDF, 1.08 MB
english, 1998
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