Synthesis of c-BN films by using a low-pressure inductively coupled BF3–He–N2–H2 plasma
Yamamoto, H., Matsumoto, S., Okada, K., Yu, J., Hirakuri, K.Volume:
15
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.10.007
Date:
September, 2006
File:
PDF, 344 KB
english, 2006