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Improved GaN-on-Si epitaxial quality by incorporating various SixNy interlayer structures
Wang, Tzu-Yu, Ou, Sin-Liang, Horng, Ray-Hua, Wuu, Dong-SingVolume:
399
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2014.04.016
Date:
August, 2014
File:
PDF, 2.21 MB
english, 2014