Optical and electrical characteristics of plasma enhanced...

Optical and electrical characteristics of plasma enhanced chemical vapor deposition boron carbonitride thin films derived from N-trimethylborazine precursor

Sulyaeva, Veronica S., Kosinova, Marina L., Rumyantsev, Yurii M., Kuznetsov, Fedor A., Kesler, Valerii G., Kirienko, Viktor V.
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Volume:
558
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.02.082
Date:
May, 2014
File:
PDF, 1.09 MB
english, 2014
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