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Simplified processes using conductive passivation film for the fabrication of Al micro-wires by electromigration
Kimura, Yasuhiro, Saka, MasumiVolume:
116
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2013.11.044
Date:
February, 2014
File:
PDF, 1.55 MB
english, 2014