Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio
Cui, Jiwen, Feng, Kunpeng, Zhu, Shengqi, Zhang, Yue, Tan, JiubinVolume:
47
Language:
english
Journal:
Measurement
DOI:
10.1016/j.measurement.2013.10.004
Date:
January, 2014
File:
PDF, 1.49 MB
english, 2014