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Silicon monoxide role in silicon nanocluster formation during Si-rich oxide layer annealing – Monte Carlo simulation
Mikhantiev, Eugene A., Neizvestny, Igor G., Usenkov, Stanislav V., Shwartz, Nataliya L.Volume:
90
Language:
english
Journal:
Computational Materials Science
DOI:
10.1016/j.commatsci.2014.04.003
Date:
July, 2014
File:
PDF, 2.21 MB
english, 2014