In-situ doping of erbium in hydrogenated amorphous carbon...

Thin Solid Films 2014 / 11 Vol. 570

In-situ doping of erbium in hydrogenated amorphous carbon by low temperature metalorganic radio frequency plasma enhanced chemical vapor deposition

Hsu, Hui-Lin, Leong, Keith R., Halamicek, Michael, Teng, I-Ju, Mahtani, Pratish, Juang, Jenh-Yih, Jian, Sheng-Rui, Qian, Li, Kherani, Nazir P.
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Volume:
570
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.02.038
Date:
November, 2014
File:
PDF, 541 KB
english, 2014
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