Formation process of Si3N4 particles on surface of Si ingots grown using silica crucibles with Si3N4 coating by noncontact crucible method
Nakajima, Kazuo, Morishita, Kohei, Murai, Ryota, Usami, NoritakaVolume:
389
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2013.12.006
Date:
March, 2014
File:
PDF, 6.16 MB
english, 2014