Formation process of Si3N4 particles on surface of Si...

Formation process of Si3N4 particles on surface of Si ingots grown using silica crucibles with Si3N4 coating by noncontact crucible method

Nakajima, Kazuo, Morishita, Kohei, Murai, Ryota, Usami, Noritaka
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Volume:
389
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2013.12.006
Date:
March, 2014
File:
PDF, 6.16 MB
english, 2014
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