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An effective procedure for sensor variable selection and utilization in plasma etching for semiconductor manufacturing
Baek, Kye Hyun, Edgar, Thomas F., Song, Kiwook, Choi, Gilheyun, Cho, Han Ku, Han, ChonghunVolume:
61
Language:
english
Journal:
Computers & Chemical Engineering
DOI:
10.1016/j.compchemeng.2013.09.016
Date:
February, 2014
File:
PDF, 1.11 MB
english, 2014