C-BN thin film formation in a hybrid r.f.-PLD technique

Diamond and Related Materials 1997 / 4 Vol. 6; Iss. 5-7

C-BN thin film formation in a hybrid r.f.-PLD technique

Klotzbücher, T., Mergens, M., Wesner, D.A., Kreutz, E.W.
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(96)00612-7
Date:
April, 1997
File:
PDF, 788 KB
english, 1997
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