Chemocapacitive sensor arrays on Si substrate: Towards the...

Microelectronic Engineering 2014 / 05 Vol. 119

Chemocapacitive sensor arrays on Si substrate: Towards the hybrid integration with read-out electronics

Oikonomou, P., Botsialas, A., Olziersky, A., Goustouridis, D., Speliotis, A., Raptis, I., Sanopoulou, M.
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Volume:
119
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.007
Date:
May, 2014
File:
PDF, 1.17 MB
english, 2014
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