Influence of hydrogen content and network connectivity on the coefficient of thermal expansion and thermal stability for a-SiC:H thin films
King, Sean W., Ross, Liza, Li, Han, Xu, Guanghai, Bielefeld, Jeff, Atkins, Ryan E., Henneghan, Patrick D., Davis, Kathleen, Johnson, David C., Lanford, William A.Volume:
389
Language:
english
Journal:
Journal of Non-Crystalline Solids
DOI:
10.1016/j.jnoncrysol.2014.02.007
Date:
April, 2014
File:
PDF, 971 KB
english, 2014