Process optimisation of a MEMS based PZT actuated microswitch
Tommasi, A., Coletta, G., Balma, D., Marasso, S.L., Perrone, D., Canavese, G., Stassi, S., Bianco, S., Cocuzza, M., Pirri, C.F.Volume:
119
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.04.005
Date:
May, 2014
File:
PDF, 904 KB
english, 2014