Oxygen effect in radio frequency magnetron sputtered...

Oxygen effect in radio frequency magnetron sputtered aluminium doped zinc oxide films

Rahmane, Saad, Djouadi, Mohamed Abdou, Aida, Mohamed Salah, Barreau, Nicolas
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Volume:
562
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.03.073
Date:
July, 2014
File:
PDF, 821 KB
english, 2014
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