Growth of highly conformal ruthenium-oxide thin films with...

Journal of Alloys and Compounds 2014 / 10 Vol. 610

Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition

Park, Ji-Yoon, Yeo, Seungmin, Cheon, Taehoon, Kim, Soo-Hyun, Kim, Min-Kyu, Kim, Hyungjun, Hong, Tae Eun, Lee, Do-Joong
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Volume:
610
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2014.04.186
Date:
October, 2014
File:
PDF, 2.71 MB
english, 2014
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