Characterization of Ta–Si–N coatings prepared using direct...

Applied Surface Science 2014 / 06 Vol. 305

Characterization of Ta–Si–N coatings prepared using direct current magnetron co-sputtering

Chen, Yung-I, Lin, Kun-Yi, Wang, Hsiu-Hui, Cheng, Yu-Ru
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Volume:
305
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.04.011
Date:
June, 2014
File:
PDF, 3.32 MB
english, 2014
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