Fabrication of multiple large arrays of split ring...

Microelectronic Engineering 2014 / 09 Vol. 127

Fabrication of multiple large arrays of split ring resonators by X-ray lithographic process for sensing purposes

Giorgis, V., Zilio, P., Massari, M., Ruffato, G., Zacco, G., Romanato, F.
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Volume:
127
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.04.030
Date:
September, 2014
File:
PDF, 1.02 MB
english, 2014
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