Crystallinity, etchability, electrical and mechanical...

Thin Solid Films 2014 / 05 Vol. 559

Crystallinity, etchability, electrical and mechanical properties of Ga doped amorphous indium tin oxide thin films deposited by direct current magnetron sputtering

Lee, Hyun-Jun, Song, Pung-Keun
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Volume:
559
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.10.106
Date:
May, 2014
File:
PDF, 749 KB
english, 2014
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