Numerical optimization of baffles for sputtering optical...

Surface and Coatings Technology 2014 / 02 Vol. 241

Numerical optimization of baffles for sputtering optical precision filters

Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, Michael
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
241
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.11.008
Date:
February, 2014
File:
PDF, 933 KB
english, 2014
Conversion to is in progress
Conversion to is failed