Ridge waveguide fabrication by combining ion implantation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 / 05 Vol. 326

Ridge waveguide fabrication by combining ion implantation and precise dicing on a LiNbO3 crystal

Zhou, Yu-Fan, Wang, Lei, Liu, Peng, Liu, Tao, Zhang, Lian, Huang, Dong-Ting, Wang, Xue-Lin
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Volume:
326
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.09.037
Date:
May, 2014
File:
PDF, 746 KB
english, 2014
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