Release etching and characterization of MEMS capacitive...

Sensors and Actuators A: Physical 2014 / 06 Vol. 212

Release etching and characterization of MEMS capacitive pressure sensors integrated on a standard 8-metal 130nm CMOS process

Sundararajan, A.D., Hasan, S.M. Rezaul
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Volume:
212
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.03.009
Date:
June, 2014
File:
PDF, 4.85 MB
english, 2014
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