HKMG CMOS technology qualification: The PBTI reliability...

HKMG CMOS technology qualification: The PBTI reliability challenge

Ioannou, Dimitris P.
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Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.03.018
Date:
August, 2014
File:
PDF, 1.80 MB
english, 2014
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