Research of non-uniformity in 450mm multi-electrode...

Thin Solid Films 2013 / 11 Vol. 547

Research of non-uniformity in 450mm multi-electrode capacitive coupled plasma

Park, Gi Jung, Lee, Yoon Seong, Seo, Sang Hoon, Chung, Chin Wook, Chang, Hong Young
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Volume:
547
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.044
Date:
November, 2013
File:
PDF, 1.37 MB
english, 2013
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