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Relations between the deposition conditions, the microstructure and the defects in PECVD hydrogenated amorphous carbon films; influence on the electronic density of states
Theye, M.-L., Paret, V., Sadki, A.Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00466-0
Date:
February, 2001
File:
PDF, 150 KB
english, 2001