Electron resists prepared from colloidal dispersions of poly(methyl methacrylate) in non-solvents
David R. Cowley, Colin Price, Christopher J. HardyVolume:
21
Year:
1980
Language:
english
Pages:
2
DOI:
10.1016/0032-3861(80)90129-9
File:
PDF, 230 KB
english, 1980