Improved high-temperature stability of Si incorporated a-C:H films
Camargo, S.S, Baia Neto, A.L, Santos, R.A, Freire, F.L, Carius, R, Finger, FVolume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00165-4
Date:
August, 1998
File:
PDF, 304 KB
english, 1998