Stress evaluation in thin films: Micro-focus synchrotron...

Thin Solid Films 2013 / 12 Vol. 549

Stress evaluation in thin films: Micro-focus synchrotron X-ray diffraction combined with focused ion beam patterning for do evaluation

Baimpas, Nikolaos, Le Bourhis, Eric, Eve, Sophie, Thiaudière, Dominique, Hardie, Christopher, Korsunsky, Alexander M.
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Volume:
549
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.019
Date:
December, 2013
File:
PDF, 819 KB
english, 2013
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