Fabrication and application of temperature triggered MEMS...

Fabrication and application of temperature triggered MEMS switch for active cooling control in Solid State Lighting system

Ye, Huaiyu, Wei, Jia, van Zeijl, Henk W., Sarro, Pasqualina M., Zhang, Guoqi
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Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.02.012
Date:
June, 2014
File:
PDF, 2.23 MB
english, 2014
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