a-SiC:H films deposited by PECVD from silane + acetylene...

Diamond and Related Materials 1997 / 10 Vol. 6; Iss. 11

a-SiC:H films deposited by PECVD from silane + acetylene and silane + acetylene + hydrogen gas mixture

Giorgis, F., Pirri, C.F., Tresso, E., Rava, P.
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00031-9
Date:
October, 1997
File:
PDF, 1.07 MB
english, 1997
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