Precise broad-band anti-refection coating fabricated by atomic layer deposition
Li, Yanghui, Shen, Weidong, Zhang, Yueguang, Hao, Xiang, Fan, Huanhuan, Liu, XuVolume:
292
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2012.11.071
Date:
April, 2013
File:
PDF, 521 KB
english, 2013