Comparative study of microstructure in a-CxN1–x films deposited by radiofrequency magnetron sputtering
Durand-Drouhin, O, Lejeune, M, Clin, M, Benlahsen, M, Henocque, J, Zeinert, AVolume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00482-9
Date:
March, 2001
File:
PDF, 116 KB
english, 2001