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Synthesis of alkali-soluble silicone resin suitable for resist material in microlithography
Hiroshi Ban, Akinobu Tanaka, Yoshio Kawai, Saburo ImamuraVolume:
31
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0032-3861(90)90403-l
File:
PDF, 538 KB
english, 1990