Investigation of Depth of Laser Damage to Silicon as...

Energy Procedia 2013 Vol. 38

Investigation of Depth of Laser Damage to Silicon as Function of Wavelength and Pulse Duration

Thorstensen, Jostein, Foss, Sean Erik
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Volume:
38
Year:
2013
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2013.07.348
File:
PDF, 617 KB
english, 2013
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