![](/img/cover-not-exists.png)
Cationic chemistry and chemically amplified resist materials for microlithography: synthesis and applications of copolymers of 4-(1-hydroxy-1-methylethyl)styrene and styrene or 4-hydroxystyrene
Masahiro Yoshida, Jean M.J. FréchetVolume:
35
Year:
1994
Language:
english
Pages:
9
DOI:
10.1016/0032-3861(94)90041-8
File:
PDF, 679 KB
english, 1994