Cationic chemistry and chemically amplified resist...

Cationic chemistry and chemically amplified resist materials for microlithography: synthesis and applications of copolymers of 4-(1-hydroxy-1-methylethyl)styrene and styrene or 4-hydroxystyrene

Masahiro Yoshida, Jean M.J. Fréchet
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
35
Year:
1994
Language:
english
Pages:
9
DOI:
10.1016/0032-3861(94)90041-8
File:
PDF, 679 KB
english, 1994
Conversion to is in progress
Conversion to is failed