Fabrication of fluorocarbon terminated DLC thin film using...

Diamond and Related Materials 2008 / 4 Vol. 17; Iss. 4-5

Fabrication of fluorocarbon terminated DLC thin film using soft X-ray

Yamada, N., Kanda, K., Saikubo, A., Niibe, M., Haruyama, Y., Matsui, S.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.08.044
Date:
April, 2008
File:
PDF, 252 KB
english, 2008
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