Multiple centimetre-long fluidic-channels with smooth and...

Microelectronic Engineering 2012 / 10 Vol. 98

Multiple centimetre-long fluidic-channels with smooth and vertical sidewall fabricated by novel NIL mould and thermal bonding

Li, Xiaojun, Chen, Yong, Qiu, Keqiang, Wang, Xudi, Tian, Yangchao, You, Hui, Fu, Shaojun
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.073
Date:
October, 2012
File:
PDF, 986 KB
english, 2012
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