Comparative study of self-assembling of multilayers using reactive sputter deposition and mass selective ion beam deposition
Wu, Wan-Yu, Ting, Jyh-Ming, Zutz, Hayo, Lyzwa, Dominika, Gerhards, Inga, Ronning, Carsten, Hofsäss, HansVolume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.01.048
Date:
July, 2008
File:
PDF, 847 KB
english, 2008