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Imaging method for vibrating scanning force microscopy cantilevers for the analysis of mode shapes and nonlinear harmonic motion
Sturm, Heinz, Schröter, Maria-Astrid, Weimann, ChristianeVolume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.088
Date:
October, 2012
File:
PDF, 993 KB
english, 2012