Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity
Li, Xiangmeng, Shao, Jinyou, Ding, Yucheng, Tian, HongmiaoVolume:
307
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.04.039
Date:
July, 2014
File:
PDF, 1.78 MB
english, 2014