Stress reduction in a-C:H coatings through the addition of...

Diamond and Related Materials 2004 / 9 Vol. 13; Iss. 9

Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

Rabbani, F., Escobar Galindo, R., Arnoldbik, W.M., van der Zwaag, S., van Veen, A., Schut, H.
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Volume:
13
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.02.003
Date:
September, 2004
File:
PDF, 265 KB
english, 2004
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