Black germanium produced by inductively coupled plasma etching
Schicho, Sandra, Jaouad, Abdelatif, Sellmer, Christian, Morris, Denis, Aimez, Vincent, Arès, RichardVolume:
94
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2012.12.014
Date:
March, 2013
File:
PDF, 439 KB
english, 2013